Plasma-Therm Technical Workshop Supports Scandinavia Semiconductor and Material Science Technology Sectors
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Press release date: July 11, 2012
St. Petersburg, Florida - The recent Plasma-Therm advanced plasma processing workshop held at Lund University provided fundamental and advanced technology used in the semiconductor device and materials research. Attendees from Scandinavia participated a full day of presentations focusing on applying plasma etching and deposition to fabricating electronic, photonic, bioscience, and nano-scale devices and structures. This workshop is one of many held at centers of excellence throughout the world by Plasma-Therm, a leading semiconductor plasma processing equipment supplier.
Dr. Ivan Maximov, Head of Nano-process Laboratory, Deputy Director of the Lund Nano Lab commented on the well-attended event, "We were very happy to host the Plasma-Therm Technical Workshop on Fundamentals of Plasma Processing in Lund. It provided us with a good introduction into the basics of plasma processing and at the same time it was very useful for these who already work with plasma etching or deposition. The workshop has undoubtedly improved our understanding of reactive ion etching processes of III-Vs and Si and associated PECVD processes which we used in our labs on a daily basis."
"Plasma processing continues to play a critical role in extending the boundaries of semiconductor device fabrication and material engineering," Dr. David Lishan, Plasma-Therm Principal Scientist and workshop director continues, "The workshop format addresses a strong need to provide fundamental and advanced etching and deposition concepts to the academic and industrial communities. The value of these workshops is confirmed by the high interest levels of graduate students as well as senior researchers and process engineers. We are pleased to sponsor these events that encourage potential collaboration across diverse disciplines."
Plasma-Therm Lund Workshop
Page 2 of 2 About Lund Nano Lab at the Lund University, Lund, Sweden The Lund Nano Lab (LNL) cleanroom, inaugurated in 2007, is the latest addition to the research environment of the Nanometer Structure Consortium at Lund University (nmC@LU), established in 1988 (http://www.nano.lth.se). The purpose of the LNL is to provide high-quality nanofabrication facilities for both academic research groups and local companies. With its approximately 200 registered users, the laboratory is a center for multi-disciplinary research in materials science, quantum physics and life-sciences in Southern Sweden. The current focus of activity at nmC@LU is basic studies and applications of III-V epitaxial nanowires.
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics and wireless communication. They offer leading etching and deposition technologies and solutions for these markets. Sales and service locations throughout North America, Europe and Asia-Pacific meet the diverse needs of Plasma-Therm's global customer base. Please visit www.plasmatherm.com for more information.