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Paul Arnold, Senior Scientist, to Present at the American Vacuum Society's 54th International Symposium & Exhibition in Seattle, Washington

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(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)

Brooks Automation Inc.
15 Elizabeth Dr.
Chelmsford, MA, 01824
USA



Press release date: September 19, 2007

LONGMONT, Colo., Sept. 19 -- Brooks Automation, Inc. (NASDAQ:BRKS) announced today that Mr. Paul Arnold, Senior Scientist and American Vacuum Society Fellow, will present a paper and provide an in-depth technical discussion during the American Vacuum Society's 54th International Symposium & Exhibition. His primary focus will be on the theory, design and implementation of heat-loss vacuum gauges with unique geometries and conversion of measured parameters into pressure indications. The basis for conversion errors and inaccuracies will also be covered, as well as methods to avoid the common pitfalls of conventional Pirani gauge measurement issues. In addition, Mr. Arnold will detail the application of improved measurement technology to Granville-Phillips'® miniaturized heat-loss Conductron® Gauge.

Mr. Arnold's presentation is scheduled for 9:40a.m. local time on Thursday, October 18, 2007 at the Washington State Convention Center, Room 618, 800 Convention Place, Seattle, Washington. In addition to having distinguished himself as an AVS Fellow and a member of the Brooks Business Unit Patent Committee; Mr. Arnold's career with Granville-Phillips and the ultra high vacuum (UHV) measurement products industry spans more than 45 years. He will be available to share his extensive high vacuum (HV) and UHV pressure measurement knowledge and experience through follow-up discussions at the Brooks exhibitor booth, #311 on the exhibition floor at Seattle Convention Center. The booth will provide attendees with the added opportunity to examine Granville-Phillips' complete line of vacuum measurement solutions and Brooks' Polycold® Chillers and CTI-Cryogenics® Pumps for the Semiconductor, Storage, Flat Panel, Mass Spectrometer and other manufacturing equipment industries.

Granville-Phillips® is a Product Group within the Brooks Automation, Inc. family of world class automation and vacuum solution products. As the worldwide market share leader in heat-loss gauges, vacuum gauge controllers and stand-alone gauge modules, Granville-Phillips® has over the past four decades, provided high vacuum (HV) and ultra high vacuum (UHV) Ionization Gauge, Heat-Loss Gauge, and Vacuum Gauge Controller solutions for the Semiconductor, Industrial and Government/University Pressure Measurement Markets. The company pioneered the convection-enhanced Pirani gauge in 1977 and later advanced Pirani gauge technology with the miniaturized heat-loss Conductron® Gauge. Mr. Arnold will discuss the characteristics of Pirani- style gauges, sensor theory and effects that can lead to measurement inaccuracies.

About Brooks Automation, Inc.

Brooks is a leading worldwide provider of automation solutions and integrated subsystems to the global semiconductor and related industries. The company's advanced offerings in hardware and services can help customers improve manufacturing efficiencies, accelerate time-to-market and reduce cost of ownership. Brooks' products and global services are used in virtually every semiconductor fab in the world as well as in a number of diverse industries outside of semiconductor manufacturing. For more information see http://www.brooks.com/ or email co.csr@brooks.com

Source: Brooks Automation, Inc.

Web site: http://www.brooks.com/
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