Brooks GF120 Thermal Mass Flow Controllers Now Available with a Safe Delivery System Option |
Brooks Instrument
407 W. Vine St.
Hatfield, PA, 19440
USA
Press release date: September 6, 2011
HATFIELD, Pa. - Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, now offers a new Safe Delivery System (SDS®) option for its GF120 mass flow controllers. The GF120 SDS is a low-pressure drop mass flow controller that delivers sub-atmospheric SDS gases used in implant and etch processes. Sub-atmosphereic SDS gases are adsorbed onto a solid medium within the gas cylinder, remaining below atmospheric pressure despite containing up to 15 times more dopant than conventional pressurized sources. Most mass flow controllers require a 50 Torr differential pressure at flow rates of 5 sccm; however, with that pressure drop, only about 65 percent of the dopant can be extracted. The GF120 SDS low-pressure operation enables a further 30% of the dopant to be extracted. This drives significant cost-savings in SDS gases and equipment.
The GF120 SDS models may also be used in other challenging applications that require low pressure drop. These devices are available in full-scale flow ranges from 4 sccm to 1 slpm. For more information about the GF120 SDS, visit http://brooksinstrument.com.
About Brooks Instrument Brooks Instrument, LLC, based in Pennsylvania, is a company of highly trained specialists whose goal is to provide flow solutions that exceed customer expectations. The Company has a proven history of innovation including the first pressure transient insensitive (PTI) mass flow controller, the first watertight and explosion proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series), the first variable area flow meter with Foundation Fieldbus (MT3809 & MT3750), and the first miniaturaized Coriolis mass flow controller (Quantim). Today, Brooks Instrument's portfolio includes glass and metal tube variable area flow meters (rotameters), thermal mass flow controllers and meters, Coriolis mass flow controllers and meters, pressure control products, vacuum capacitance manometers, magnetic level instruments, and a variety of flow accessories. The Company also owns Key Instruments which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, electronic flow meters, and flow control valves. Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit www.BrooksInstrument.com.
For inquiries, please contact:
Jim Hollis
Marketing Communications Manager
407 West Vine Street, Hatfield, PA 19440
T: 215.362.3527
F: 215.362.3687
E: Jim.Hollis@BrooksInstrument.com
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