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Axcelis Announces Order for 'Purion M' Medium Current Implanter from Second Leading Chip Manufacturer

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Axcelis Technologies Inc.
55 Cherry Hill Dr.
Beverly, MA, 01915 1053

Press release date: April 15, 2014

Successful Evaluation Exceeded Goals Across Numerous Critical Performance Categories

BEVERLY, Mass. – Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has received an order for the Company's next generation Purion M™ medium current implanter from a second leading chipmaker in Asia. The system was ordered after a very successful evaluation process where the product exceeded goals in numerous performance categories. Utilizing Axcelis' industry leading Contamination Shield™ and Vector™ technology the Purion M demonstrated unmatched levels of purity and precision while simultaneously achieving a new benchmark in productivity for the customer's most advanced technologies.

John Aldeborgh, executive vice president of customer operations, commented, "We're very pleased to secure this order, and the opportunity to support the customer's advanced manufacturing process. The Purion M, built utilizing our next generation Purion platform, was designed to meet our customer's most stringent requirements for their next generation processes while ensuring superior levels of system productivity. The system ushers in a new era of innovation in medium current technology for the first time in over a decade." He continued, "This order is the result of the system's capability to demonstrate the industry's lowest levels of contamination and the industry's most precise dopant placement, both critical requirements as our customer's transition to sub 10nm advanced planar and 3D devices. We're proud to continue our close collaboration with this very important customer as they ramp their manufacturing capacity."

The Purion Platform
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform, we've built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at

Axcelis Technologies, Inc.

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