Pfeiffer Vacuum, Inc.
Nashua, NH 03063
Dry Pumping Station offers pumping speed of 60 l/s.
Available with 63 CF or 63 ISO flange sizes, plug-and-play E-Station includes turbo and dry diaphragm pump with ultimate pressure of 10-8. DCU allows control and diagnostics. Bench-top station is suited for research and development as well as vacuum applications that require hydrocarbon-free vacuum.
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Turbo Pump goes from atmosphere to high-vacuum.
Used as standalone unit or as backing pump for turbopumps, OnTool(TM) Booster pump provides one-pump solution for achieving high vacuum. It eliminates need for backing pump due to its pumping speed of 130 m-³/h and pressure of less than 1 x 10-5 mbar. Suited for clean applications that operate without any particulate matter, corrosive gases, or condensation, product produces minimal vibration...
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Turbo Pumps handle heavy particulate loads.
Turbo Pumps feature combination of pumping speeds from 1,200-2,100 l/s and throughput up to 2 slpm. Rotor/bearing design ensures MTBF better than 200,000 hours. Suited for harsh duty applications, pumps are designed to operate safely even after sudden stops. All utilize integrated controller with interchangeable peripherals and cables, and are available with IP54-rated integrated power supplies...
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Magnetically Coupled Root Pumps are maintenance-free.
Magnetic Root Pumps are statically sealed against atmosphere, eliminating rotating seals that wear and leak, as well as cross contamination and oil pollution. Ranging from 250-6,000 mÃ-³/hr, units are also hermetically sealed, resulting in negligible leak rate of less than 1 x 10-5 mbar l/sec. Pumps are suited for chemical plant, coating, semiconductor, research and development, metallurgy,...
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Helium Leak Detector suits variety of applications.
SmartTest(TM) delivers results at max inlet pressure of 25 mbar, and detects helium leaks at rate of 5 x 10-12 mbar l/sec. Unit features integrated test leak for self-calibration, vacuum and sniffer operating modes, and optional industrial proof hand held remote control. Backing pump is user-selectable to match application needs in semiconductor, automotive component testing, refrigeration, and...
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Pumps suit coating and semiconductor applications.
With 1,200 l/s pumping capacity, TPH 1201 turbopump is designed for harsh-duty applications with rotor geometry that permits foreline tolerance of 0.5 mbar without requiring drag stage. Performance of TPH 2301 minimizes number of pumps required in semiconductor 300 mm multi-pump chambers. It delivers 2,100 l/s for Nitrogen and 1,950 l/s for Hydrogen and Argon, while offering more than 2,000 sccm...
Read More »Dry Vacuum Pump has integrated gas-ballast valve.
XtraDry(TM) positive displacement dry vacuum pump features piston style design that does not expose bearings to high-vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulate that can contaminate vacuum processes. Pumping speed is independent of gas species, with 2-stage version providing pumping speed of 7 mÃ-³/hr and base pressure of 0.05 mbar. Single-stage...
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Dry Pump delivers low particulate generation.
XtraDry positive displacement dry pump features piston style design, which does not expose bearings to high vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulates that can contaminate vacuum processes. Pumping speed is independent of gas species with 2-stage version providing pumping speed of 9 mÃ-³/h and base pressure of 0.05 mbar. Single-stage model has...
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Rotary Vane Pump eliminates oil leaks.
Model UNO 30M single-stage vacuum pump delivers pumping speed of 35 mÃ-³/hr at 60 Hz and comes standard with single-phase motor for easy electrical connection. Magnetic coupling eliminates radial shaft seals, resulting in less pump wear. Pump is hermetically sealed with negligible leak rate of
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Turbopump has small, rectangular body.
Designed for use in portable, battery-powered, or compact analytical instruments, CompactTurbo TPD 011 measures 2.5 x 2.5 x 6.7 in. With pumping speed of 10 L/s for Nitrogen and pressure rating of 5 x 10-5 mbar, pump is operated via RS485 interface through control unit or PC. When combined with small rotary vane or diaphragm pump, unit completes total vacuum package. CompactTurbo TPD 011 includes...
Read More »
Dry Pumping Station offers pumping speed of 60 l/s.
Available with 63 CF or 63 ISO flange sizes, plug-and-play E-Station includes turbo and dry diaphragm pump with ultimate pressure of 10-8. DCU allows control and diagnostics. Bench-top station is suited for research and development as well as vacuum applications that require hydrocarbon-free vacuum.
Read More »
Turbo Pump goes from atmosphere to high-vacuum.
Used as standalone unit or as backing pump for turbopumps, OnTool(TM) Booster pump provides one-pump solution for achieving high vacuum. It eliminates need for backing pump due to its pumping speed of 130 m-³/h and pressure of less than 1 x 10-5 mbar. Suited for clean applications that operate without any particulate matter, corrosive gases, or condensation, product produces minimal vibration...
Read More »
Turbo Pumps handle heavy particulate loads.
Turbo Pumps feature combination of pumping speeds from 1,200-2,100 l/s and throughput up to 2 slpm. Rotor/bearing design ensures MTBF better than 200,000 hours. Suited for harsh duty applications, pumps are designed to operate safely even after sudden stops. All utilize integrated controller with interchangeable peripherals and cables, and are available with IP54-rated integrated power supplies...
Read More »
Magnetically Coupled Root Pumps are maintenance-free.
Magnetic Root Pumps are statically sealed against atmosphere, eliminating rotating seals that wear and leak, as well as cross contamination and oil pollution. Ranging from 250-6,000 mÃ-³/hr, units are also hermetically sealed, resulting in negligible leak rate of less than 1 x 10-5 mbar l/sec. Pumps are suited for chemical plant, coating, semiconductor, research and development, metallurgy,...
Read More »
Helium Leak Detector suits variety of applications.
SmartTest(TM) delivers results at max inlet pressure of 25 mbar, and detects helium leaks at rate of 5 x 10-12 mbar l/sec. Unit features integrated test leak for self-calibration, vacuum and sniffer operating modes, and optional industrial proof hand held remote control. Backing pump is user-selectable to match application needs in semiconductor, automotive component testing, refrigeration, and...
Read More »
Pumps suit coating and semiconductor applications.
With 1,200 l/s pumping capacity, TPH 1201 turbopump is designed for harsh-duty applications with rotor geometry that permits foreline tolerance of 0.5 mbar without requiring drag stage. Performance of TPH 2301 minimizes number of pumps required in semiconductor 300 mm multi-pump chambers. It delivers 2,100 l/s for Nitrogen and 1,950 l/s for Hydrogen and Argon, while offering more than 2,000 sccm...
Read More »Dry Vacuum Pump has integrated gas-ballast valve.
XtraDry(TM) positive displacement dry vacuum pump features piston style design that does not expose bearings to high-vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulate that can contaminate vacuum processes. Pumping speed is independent of gas species, with 2-stage version providing pumping speed of 7 mÃ-³/hr and base pressure of 0.05 mbar. Single-stage...
Read More »
Dry Pump delivers low particulate generation.
XtraDry positive displacement dry pump features piston style design, which does not expose bearings to high vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulates that can contaminate vacuum processes. Pumping speed is independent of gas species with 2-stage version providing pumping speed of 9 mÃ-³/h and base pressure of 0.05 mbar. Single-stage model has...
Read More »
Rotary Vane Pump eliminates oil leaks.
Model UNO 30M single-stage vacuum pump delivers pumping speed of 35 mÃ-³/hr at 60 Hz and comes standard with single-phase motor for easy electrical connection. Magnetic coupling eliminates radial shaft seals, resulting in less pump wear. Pump is hermetically sealed with negligible leak rate of
Read More »
Turbopump has small, rectangular body.
Designed for use in portable, battery-powered, or compact analytical instruments, CompactTurbo TPD 011 measures 2.5 x 2.5 x 6.7 in. With pumping speed of 10 L/s for Nitrogen and pressure rating of 5 x 10-5 mbar, pump is operated via RS485 interface through control unit or PC. When combined with small rotary vane or diaphragm pump, unit completes total vacuum package. CompactTurbo TPD 011 includes...
Read More »