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Available on Argon Fluoride light sources, SmartPulse(TM) provides wafer-level light source parameter monitoring to enable direct correlation to on-wafer performance for optimum process control and yield. Beam metrology module delivers real-time beam performance data from light source, resulting in comprehensive data set. Supporting Fault Detection Classification requirements, SmartPulse(TM)... Read More
ELS(TM) 7010x Krypton Fluoride (KrF) light source lets operator adjust power from 30-50 W to accommodate changing wafer design requirements and production needs. In addition to real-time variable power flexibility that enables chipmakers to increase wafer output by up to 25%, system employs Gas Lifetime eXtension (GLX(TM)) technology to reduce system downtime during gas exchanges. Power... Read More
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